The application of the cathodic arc to plasma assisted chemical vapor deposition of carbon
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چکیده
منابع مشابه
Comparison of Properties of Ti/TiN/TiCN/TiAlN Film Deposited by Cathodic Arc Physical Vapor and Plasma-assisted Chemical Vapor Deposition on Custom 450 Steel Substrates
This study investigated the effects of deposition techniques on the microstructural and tribological properties of Ti/TiN/TiCN/TiAlN multilayer coatings onto a Custom 450 steel substrate. The coatings were produced using cathodic arc physical vapor deposition (CAPVD) and plasma-assisted chemical vapor deposition (PACVD). The microstructural of the coatings was evaluated using (SEM), and phase f...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 1996
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.362649